Solid State Technology I (WS) (2 1 -)
- Mandatory subject for electrical engineering students with solid state electronics specialization.
- Optional subject (Wahlpflichtfach) for other electrical engineering students.
- Subsidiary subject (Nebenfach) for physics students (in the combination Solid State Techn. I+II+Lab course)
Advanced semiconductor processing technologies: Theory of solids, especially semiconductors, basics of epitaxial growth, basic aspects concerning processing of solids like oxidation, lithography, etching, diffusion, ion implantation, metallization up to VLSI-process-integration, topics on analytical methods.
Solid State Technology II (SS) (2 1 -)
- Mandatory subject for electrical engineering students with solid state electronics specialization.
- Optional subject (Wahlpflichtfach) for other electrical engineering students.
- Subsidiary subject (Nebenfach) for physics students (in the combination Solid State Techn. I+II+Lab course)
Advanced semiconductor processing technologies: Introduction to electronic properties of quantum structures and the theory of quantum electronics, most important epitaxial techniques and their in situ analysis, quantum electronic devices, strained layer heterostructures, high temperature superconductors.