Laboratory Equipment


In order to allow access to a state-of-the-art research facility, to enable quick implementation of ideas in a highly competitive and dynamical research environment and to maintain a highly developed knowledge base, the Institute of Semiconductor Electronics together with several other research units within the the Faculty of Electrical Engineering and Information Technology and Department of Physics at RWTH Aachen University set up a shared user facility, the Central Laboratory for Micro- and Nanotechnology, that is open to RWTH-internal useres as well as external users from academia or industry.

Please refer to the website of the Central Laboratory for Micro- and Nanotechnology to find a complete list of the technological and metrological equipment available.