Simulation Programs


Ultrathin-Body Silicon-on-Insulator MOSFET

MOSFET characteristic

Based on the non-equilibrium Green's function formalism this program computes the Id-Vgs characteristics of short channel, ultrathin-body silicon-on-insulator metal-oxide semiconductor field-effect transistors. Ballistic electronic carrier transport and room temperature condictions are assumed. The simulation takes gate leakage (both, due to quantum mechancial tunneling as well as thermal emission) into consideration. Please consult the README file for more information on how the program is used. The results will be plotted as graphical output (with the inverse subthreshold slope stated explicitely).


Sputter Deposition


This simulation program allows studying qualitatively the sputter deposition of material on samples coated with resist. The angle of the resist flank canbe adjusted by simply inserting the resist mask opening at the top and bottom of the resist layer. The simulation is based on a kinetic Monte Carlo approach, restricted to two-dimensions to simplify and speed up the simulation. Compared to experimental data (see image), the program yields reasonable agreement. Consult the README file for further information on the use of the program.


Visibility of 2D materials

Color impression of 2D material on a substrate

This program allows computing the color impression of different 2D materials (as a function of the number of layers) on top of a substrate consisting of an arbritary stack of dielectric materials.


Proximity Correction

proximity effect

This program allows to estimate the proximity effect when doing electron beam lithography. A double Gaussian is used to describe the dose desposited into the substrate at each spot. The result is displayed with graphical output (my apologies for the poor, old-fashioned graphics). A mask (with almost arbritary dose distribution) can be input by using the provided .bmp file. Use any plot program to manipulate the file and store it appropriately; use only the colors provided with exact RGB values. The README file gives more information how to use the program and how to input a certain mask file. Please be aware that the result is not quantitative but only provides qualitative data to illustrate the proximity effect.