Selective area growth and stencil lithography for in situ fabricated quantum devices

London [u.a.] / Nature Publishing Group (2019) [Journal Article]

Nature nanotechnology
Volume: 14
Issue: 9
Page(s): 825-831

Authors

Selected Authors

Schüffelgen, Peter
Rosenbach, Daniel
Li, Chuan
Schmitt, Tobias
Schleenvoigt, Michael

Other Authors

Jalil, Abdur R.
Schmitt, Sarah
Kölzer, Jonas
Wang, Meng
Bennemann, Benjamin
Parlak, Umut
Kibkalo, Lidia
Trellenkamp, Stefan
Grap, Thomas
Meertens, Doris
Luysberg, Martina
Mussler, Gregor
Berenschot, Erwin
Tas, Niels
Golubov, Alexander A.
Brinkman, Alexander
Schäpers, Thomas
Grützmacher, Detlev

Identifier